Automatic Wet benches

For acids or solvents realized with ultrapure materials

Automatic Wet Benches can be realized in different versions according to customer needs and chemical types. For solvents we normally adopt stainless steel materials according with safety rules in term of anti-fire protection. With Acids-Alkalines we use specific corrosion resistant plastics materials. In both case we use just high performance material that guaranteed no chemical contamination or degradation.
We can provide full support to dialogue with CDS, provide integrated filling system from bottle, canisters and custom buffer tanks. Manual filling is also possible.
If necessary we can provide different types of automatic dosing system that permit to create personal mixture of chemicals. With that systems is possible to pratice spikes with different percentuage directly from touch screen with extremely high precision.

Chemical on-line dosing
• On-Site-Mixing
• Batching
• Spiking
• Overflow control
• Process basin / recipe preparation
• Automated / reproducible
• Complete, integrated dosing process control system

• Process monitoring also in very dynamic flow situations
• Controlling of specified plant consumption values
• Measurement of consumption values as a basis for the logistics of inventories

In-Line Chemical solution concentration monitor
We can provide a wide range of inline concentration monitors for the different high and low concentration wet etching processes for Low-k, Al, Oxide/Nitride, Poly Silicon etc. In addition to monitors for wet etching a wide range of monitors for the different cleaning steps, for example removal of particles, resist, metallic layer, organic layers, oxides, polymers etc. are also available.

Resistivity Meter
We can provide rinses tanks with resistivity meter in order to mesure H2ODI quality and determine if all chemical traces has been removed.

Solution recirculation
We can install different types of pumps according with chemical and process charaterization/necessity. It’s possible to install pressure and flow sensor to monitor pump and understand filter lifetime and pumps problems. Stroke counter sensor/ internal leaks are also available for diaphragm pumps.

Valves
We normally install air operated and manual valves. We use diaphragm, ball and butterfly valves according to needed flow/pressure and chemical characterization. For high purity we install metal free valve that are completely realized in plastic material.

General Control
Our Automatic wet benches are ruled by PLC. Robot movements are ensured by servo-controlled motor. HMI interface is composed by a Omron o.s. proprietary touch screen or optionally by an industrial pc with touch screen that permit a more powerful and flexible software.
PLC control entire function of the WET. From the touch screen is possible to check the status of the system, change settings and do maintenance operations. All WET are provided with emergency buttons managed by safety relays.

ATEX
We can build our equipment referring to ATEX rules. In this case we will use only pneumatic and/or certified components.

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