Waste wafer destruction system

Tool for chemical destruction of waste wafers and masks

Tiger Shark is an automatic system of wafer destruction. It is dedicated to wafers that don’t pass the final test (flash technology).
Tiger Shark destroys wafer using chemicals and can be used also for masks destruction, using specific solutions.
This system is in automatic version, for 25 wafer single carrier, 8”-12”. Inside the process tank, after chemical treatment, there will be a rinse phase. Etch solution is recovered and stored into another tank, underneath, for re-use.

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