Semiconductor industries

Front End

SPM build systems that have the priority to conform to safety parameters and, at same time, high performance. To guarantee this SPM use top materials that respect severe test, that judges the chemicals, fire and mechanical resistance. SPM systems are realized with different materials, depending on chemicals used and on the level of purity according customer’s need.

With acid and basic chemicals the systems structures are built in plastic material, normally FM Approved for clean room. All mechanical components that are impossible to realize in plastic material, are covered with special plastic protections.
With solvent, the systems structures are realized in stainless steel, optional electroplated for optimal performances.
Our main production includes:

• Long term experience in CDS (Chemical Delivery System), premixing unit and microfiltration;

• Complete manufacturing of wet benches in different version completely tailored according with customer requirements;

• Automation robot and handlings;

• Innovated quartz cleaning systems and storage;

• Carrier and box for wafer clean up machines to perform a fully cleaned process;

• Special filling system to distribute chemicals;

• Installation of double piping line and distribution components;

• Service and complete assistance;

• Plasma etch (cleaning unit in vertical or horizontal version).

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